A THERMAL MICROACTUATOR FOR A SUSPENSION ARM OF A HARD DISK DRIVE AND A METHOD OF FABRICATING THE THERMAL MICROACTUATOR

摘要

A thermal microactuator for micropositioning a slider on a suspension arm of a hard disk drive, the slider being attached to a flexure, the flexure supporting a conducting layer under a cover layer, the thermal microactuator comprising at least one microactuating beam formed on the flexure under the cover layer. A method of fabricating a thermal microactuator for a suspension arm of a hard disk drive, the suspension arm comprising a slider attached to a flexure, the method comprising forming at least one microactuating beam on the flexure during fabrication of the suspension arm before attaching the slider to the flexure; and laying a cover layer over the at least one microactuating beam.