| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a kiln having reduced fluctuation in heat treatment. <P>SOLUTION: The kiln includes: a hollow cylindrical furnace core tube 5 formed by closing both ends of a cylinder part 51 by a pair of sidewall parts 52 and 53; and a driving part rotating the furnace core tube 5 around a center axis of the cylinder part 51, wherein an aperture 51a extending from one sidewall part 52 to the other sidewall part 53 is formed in the cylinder part 51, a partition plate 54 extending from one end peripheral edge of the aperture 51a as a base end in the circumferential direction of the cylinder part 51 to interrupt a part from the center axis to the aperture 51a is provided inside the cylinder part 51, and wherein the driving part drives the furnace core tube in normal and reverse driving. <P>COPYRIGHT: (C)2012,JPO&INPIT |
