发明名称 |
METHOD OF FORMATION OF NANOWIRES AND METHOD OF MANUFACTURE OF ASSOCIATED OPTICAL COMPONENT |
摘要 |
A method of formation of nanowires at a surface of a substrate attached to a solid immersion lens. The method includes formation of a catalyst element at the surface of the substrate and growth of nanowires from the catalyst element formed at the surface of the substrate. The catalyst element is a metal nanoparticle and the formation of the catalyst element at the surface of the substrate deposits the metal nanoparticle using a light beam focused by the solid immersion lens at the surface of the substrate.
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申请公布号 |
US2012021554(A1) |
申请公布日期 |
2012.01.26 |
申请号 |
US201013147081 |
申请日期 |
2010.01.28 |
申请人 |
NEEL DELPHINE;FERRET PIERRE;GETIN STEPHANE;COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENE ALT |
发明人 |
NEEL DELPHINE;FERRET PIERRE;GETIN STEPHANE |
分类号 |
H01L21/02;B82Y99/00 |
主分类号 |
H01L21/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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