发明名称 METHOD OF FORMATION OF NANOWIRES AND METHOD OF MANUFACTURE OF ASSOCIATED OPTICAL COMPONENT
摘要 A method of formation of nanowires at a surface of a substrate attached to a solid immersion lens. The method includes formation of a catalyst element at the surface of the substrate and growth of nanowires from the catalyst element formed at the surface of the substrate. The catalyst element is a metal nanoparticle and the formation of the catalyst element at the surface of the substrate deposits the metal nanoparticle using a light beam focused by the solid immersion lens at the surface of the substrate.
申请公布号 US2012021554(A1) 申请公布日期 2012.01.26
申请号 US201013147081 申请日期 2010.01.28
申请人 NEEL DELPHINE;FERRET PIERRE;GETIN STEPHANE;COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENE ALT 发明人 NEEL DELPHINE;FERRET PIERRE;GETIN STEPHANE
分类号 H01L21/02;B82Y99/00 主分类号 H01L21/02
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