发明名称 |
Microwave Plasma Generating Plasma and Plasma Torches |
摘要 |
The invention relates to a plasma generating device that comprises at least one very high frequency source (>100 MHz) connected via an impedance adaptation device to an elongated conductor attached on a dielectric substrate, at least one means for cooling said conductor, and at least one gas supply in the vicinity of the dielectric substrate on a side opposite to that bearing the conductor. The invention also relates to plasma torches using said device.
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申请公布号 |
US2012018410(A1) |
申请公布日期 |
2012.01.26 |
申请号 |
US20080679231 |
申请日期 |
2008.09.16 |
申请人 |
ZAKRZEWSKI ZENON;MOISAN MICHEL;GUERIN DANIEL;ROSTAING JEAN-CHRISTOPHE;L'AIR LIQUIDE SOCIETE ANONYME POUR L'ETUDE ET L "EXPLOITATION DES PROCEDES GEORGES CLAUDE |
发明人 |
ZAKRZEWSKI ZENON;MOISAN MICHEL;GUERIN DANIEL;ROSTAING JEAN-CHRISTOPHE |
分类号 |
B23K9/00;H05H1/46 |
主分类号 |
B23K9/00 |
代理机构 |
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代理人 |
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地址 |
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