摘要 |
Interferometric modulators include a movable mirror that is actuated by voltage applied to a plurality of electrodes relative to at least one other electrode, to define a cavity relative to a partially reflective mirror formed by a top plate. The depth of the cavity determines a bandwidth of light that is modulated by internal reflections within the cavity and which interferes with light that is reflected from a partially reflective mirror on the top plate, producing a desired reflected color of light for the modulator. Variations in manufacturing and material characteristics can cause the movable mirror to tilt relative to the partially reflective mirror, which degrades the modulation accuracy. To compensate, different voltages can be applied to the plurality of electrodes. The voltage can be determined at time of manufacture and stored in non-volatile memory, for use when the modulator is actuated during use. |