| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for producing a low-cost synthetic quartz glass preform. <P>SOLUTION: Regarding the method for producing a synthetic quartz glass preform 2 in which a glass fine particle-deposited body 1 formed using VAD (Vapor Phase Axial Deposition) is sintered in a reaction vessel A1 to be a transparent glass, the concentration of oxygen in the reaction vessel Al is controlled to 100 to 5,000 ppm, and also, fluorine is added to the glass fine particle-deposited body 1 during or before the sintering step. <P>COPYRIGHT: (C)2012,JPO&INPIT |
