发明名称 |
Apparatus and Method for Detecting a State of a Deposition Apparatus |
摘要 |
Apparatuses for deposition of one or more layers. In one aspect, an apparatus for deposition of one or more layers includes an anode; a cathode; a vacuum chamber including the anode and the cathode; a sensor configured to detect an electric potential between a section of the at least one anode and a section of the chamber. Furthermore, methods to monitor a device for deposition of one or more layers are also described.
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申请公布号 |
US2012012455(A1) |
申请公布日期 |
2012.01.19 |
申请号 |
US20100870193 |
申请日期 |
2010.08.27 |
申请人 |
MAHNKE GUIDO;STOCK BERNHARD;HANIKA MARKUS;FUELLER FERDINAND |
发明人 |
MAHNKE GUIDO;STOCK BERNHARD;HANIKA MARKUS;FUELLER FERDINAND |
分类号 |
C23C14/38 |
主分类号 |
C23C14/38 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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