发明名称 WIDE-GAP SEMICONDUCTOR SUBSTRATE AND METHOD TO FABRICATE WIDE-GAP SEMICONDUCTOR DEVICE USING THE SAME
摘要 A wide-gap semiconductor substrate includes a narrow-gap semiconductor layer, a wide-gap semiconductor layer and an alignment mark. The narrow-gap semiconductor layer has a main surface. The wide-gap semiconductor layer is epitaxially grown on the narrow-gap semiconductor layer. The alignment mark is preliminarily carved in a prescribed position on the main surface so that the alignment mark is preliminarily buried in the wide-gap semiconductor substrate.
申请公布号 US2012012857(A1) 申请公布日期 2012.01.19
申请号 US20110984106 申请日期 2011.01.04
申请人 KURAGUCHI MASAHIKO;KABUSHIKI KAISHA TOSHIBA 发明人 KURAGUCHI MASAHIKO
分类号 H01L23/544;H01L21/66 主分类号 H01L23/544
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