| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a laser beam irradiation device and a substrate sealing apparatus including the laser beam irradiation device. <P>SOLUTION: The laser beam irradiation device comprises: a laser oscillator; an optical fiber that transmits laser beams oscillated from the laser oscillator; an optical lens barrel in which the end of the optical fiber is housed and which is linearly moved on a plane orthogonal to a laser beam irradiation direction; and a pair of piezoelectric transducers that are located between the optical lens barrel and the end of the optical fiber, have one end supporting the optical fiber, and are linearly reciprocated on a plane, which is orthogonal to a laser beam direction, in such a direction that the piezoelectric transducers are orthogonal to each other. <P>COPYRIGHT: (C)2012,JPO&INPIT |
