METHOD FOR POLYMER PLASMA DEPOSITION

摘要

The present invention is related to a method for the deposition of a polymeric layer comprising inorganic particles onto a substrate, said method comprising the steps of: -generating a plasma in a gaseous medium by means of a of a plasma; -placing the substrate in contact with the plasma,or in a post-plasma area of said plasma; -introducing in said plasma or in the post-plasma area a precursor of the polymer; -introducing in said plasma or in said post-plasma area an aerosol comprising said particles.