| 摘要 |
<P>PROBLEM TO BE SOLVED: To inspect the condition of a transparent part accurately and easily. <P>SOLUTION: A visual inspection device comprises: an imaging device 10 for imaging the surface of a measuring object; an irradiation part 20 for emitting light on the surface of the measuring object; a control part 30 for controlling the relative position between a focus position of the imaging device 10 and the surface of the measuring object; and a detection part 40 for detecting luminance of an image imaged by the imaging device 10. The control part 30 controls the focus position of the imaging device 10 to a first focus position which is focused on the surface of the measured object and a second focus position which is different from the first focus position. The detection part 40 detects a foreign matter or a scratch on the surface of the measured object based on the difference between the luminance detected at the first focus position and the luminance detected at the second focus position. <P>COPYRIGHT: (C)2012,JPO&INPIT |
