| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a multi-chamber heat treatment device capable of preventing any other treatment chambers than a cooling chamber from being contaminated by a cooling liquid. <P>SOLUTION: This invention relates to a multi-chamber heat treatment device S1, provided with multiple treatment chambers including heat treatment chambers, includes: a cooling chamber 3 which is a heat treatment chamber that uses the latent heat of liquid particles to cool an object to be treated; other treatment chambers 1, 2 which are different from the cooling chamber 3; and drying devices 11, 19 which dry the cooling chamber 3. The drying devices 11, 19 include a hot air supply device 19 for supplying hot air into the cooling chamber 3. <P>COPYRIGHT: (C)2012,JPO&INPIT |
