| 摘要 |
<P>PROBLEM TO BE SOLVED: To carry out light interference observation at high accuracy without any ghost. <P>SOLUTION: The optical type measurement device uses a prism unit of a composition pasting together and integrating a first trapezoidal prism 131, a first right angle prism 132, a second right angle prism 133, a third right angle prism 134, a second trapezoidal prism 135 and a fourth right angle prism 136. A beam splitter film is formed on one surface of the two surfaces that are parallel to each other in the first trapezoidal prism, the surface is pasted onto an inclined surface of the first right angle prism holding the beam splitter film, a beam splitter film is formed on one surface of the two surfaces which are parallel to each other in the second trapezoidal prism and the surface is pasted onto an inclined surface of the fourth right angle prism holding the beam splitter film. Furthermore, the second right angle prism and the third right angle prism have polarization beam splitter films formed on one surface of respective inclined surfaces and respective inclined surfaces are pasted together holding the polarization beam splitter films. <P>COPYRIGHT: (C)2012,JPO&INPIT |
