| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a gas sensor manufacturing method capable of suppressing axial deviations which occur between a main body metal fixture and a detection element due to defective solid powder materials interposed between the main body metal fixture and the detection element, when gas sensors are manufactured. <P>SOLUTION: A solid powder material, supplied in a solid state in a manufacturing process of gas sensors, is arranged as a sample on a detection base (S13) and photographed hierarchically as a camera is made to approach by one unit stepwise (S16-S20). Contrast is compared between the same pixels in images of each hierarchy, and hierarchies that are in focus on the pixels are specified, to specify pixels focusing on chip parts which can occur in the solid powder materials. The size (volume value) of chips is determined, on the basis of the pixels (S21) and is compared with a volume reference value (S27, S28) to identify solid powder materials, in which chips of sizes that are not in conformity with specifications have occurred and the solid powder materials can be removed from a manufacturing line of gas sensors (S31). <P>COPYRIGHT: (C)2008,JPO&INPIT |
