| 发明名称 |
Fine-structure transfer apparatus and method |
| 摘要 |
A fine-structure transfer apparatus includes a stamper, a stage on which to place a transfer element having a coating of resist, and a device for heating the resist coating to be vaporized or a device for supplying a vapor of the resist into a space between the stamper and the transfer element.
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| 申请公布号 |
US8096800(B2) |
申请公布日期 |
2012.01.17 |
| 申请号 |
US20100711377 |
申请日期 |
2010.02.24 |
| 申请人 |
MORI KYOICHI;YAMASHITA NAOAKI;SHIZAWA NORITAKE;TSUSHIMA KOJI;HITACHI HIGH-TECHNOLOGIES CORPORATION |
发明人 |
MORI KYOICHI;YAMASHITA NAOAKI;SHIZAWA NORITAKE;TSUSHIMA KOJI |
| 分类号 |
A01J21/00 |
主分类号 |
A01J21/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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