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发明名称
ZUSAMMENSETZUNG ZUR BILDUNG EINES OBERSCHICHTFILMS UND VERFAHREN ZUR BILDUNG EINER FOTORESISTSTRUKTUR
摘要
申请公布号
AT540336(T)
申请公布日期
2012.01.15
申请号
AT20070829596T
申请日期
2007.10.11
申请人
JSR CORPORATION
发明人
NISHIMURA, YUKIO;SUGIE, NORIHIKO;NAKASHIMA, HIROMITSU;NATSUME, NORIHIRO;KOUNO, DAITA
分类号
G03F7/11;H01L21/027
主分类号
G03F7/11
代理机构
代理人
主权项
地址
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