RADIATION DETECTOR AND MANUFACTURING METHOD THEREFOR

摘要

The disclosed radiation detector has a radiation-sensitive detection layer provided on a substrate. Said detection layer is a polycrystalline film with an average grain size less than or equal to a pixel pitch. A polycrystalline film comprising for example CdZnTe (cadmium zinc telluride) is formed (CdZnTe film (A)) and actively doped with chlorine at a film chlorine concentration within the range 1-10 ppm (wt), or preferably, 3.1 ppm (wt). The use of a detection layer that is a polycrystalline film with an average grain size less than or equal to the pixel pitch allows the disclosed radiation detector to acquire images that have good inter-pixel characteristics (spatial resolution, sensitivity, and the like). Also, temporal fluctuations are decreased in size, improving detection characteristics related to response characteristics. As a result, detection characteristics are improved.