SUBSTRATE FOR LIGHT EMITTING DEVICE AND FABRICATION METHOD THEREOF

摘要

PURPOSE: A light emitting device and a manufacturing method thereof are provided to significantly reduce a TD(Threading Dislocation) defect in semiconductor layer growth, thereby improving internal quantum efficiency. CONSTITUTION: A semiconductor laminated structure is arranged in the upper part of a substrate. The semiconductor laminated structure comprises a first conductivity type semiconductor layer, an active layer, and a second conductivity type semiconductor layer. A plurality of unevenness patterns is arranged in the upper surface of the substrate. Each of the multiple unevenness patterns is arranged in a projected shape with respect to the substrate. The distance between the centers of two adjacent unevenness patterns among the multiple unevenness patterns is fixed.