TRANSPARENT CONDUCTIVE FILM AND MANUFACTURING METHOD THEREFOR

摘要

Disclosed is a method for manufacturing a long transparent conductive film comprising a crystalline iridium composite oxide film formed on a transparent film substrate. Said method includes: an amorphous laminate formation step in which an amorphous iridium complex oxide film that contains iridium and a tetravalent metal is formed on a long transparent film substrate by a sputtering method; and a crystallization step in which the long transparent film substrate on which the aforementioned amorphous film is formed is continuously fed into a furnace and the amorphous film is crystallized. The temperature of the furnace in the crystallization step is preferably 170-220°C, and the length of the film preferably changes by at most +2.5% in the crystallization step.