发明名称 PATTERNING LAYERS BY USING THREADS
摘要 <p>A method for patterning an article, the article comprising a first layer (18) of a first material, a first major surface of the first layer being in intimate contact with some or all of a first major surface of a second layer (16) of a second different material the method comprising providing a first thread (52) carrying a first species to remove at least a portion of the first layer, and providing a second thread (54) aligned with and adjacent the first thread and contacting the first and second threads with the first layer to remove at least part of the first layer.</p>
申请公布号 WO2012004589(A1) 申请公布日期 2012.01.12
申请号 WO2011GB51258 申请日期 2011.07.04
申请人 CAMBRIDGE ENTERPRISE LIMITED;NIGGEMANN, MICHAEL 发明人 NIGGEMANN, MICHAEL
分类号 H01L51/00 主分类号 H01L51/00
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