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发明名称
SURFACE PARTICLE DETECTOR
摘要
申请公布号
EP1325303(B1)
申请公布日期
2012.01.11
申请号
EP20010973148
申请日期
2001.09.12
申请人
PENTAGON TECHNOLOGIES GROUP, INC.
发明人
LUTZ, DONALD, G.;DUGGAN, DANIEL
分类号
G01N1/24;G01N15/02;G01N15/14;G01N35/00;G01N15/00;G01N1/00;G01N1/22
主分类号
G01N1/24
代理机构
代理人
主权项
地址
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