| 摘要 |
<P>PROBLEM TO BE SOLVED: To reduce the size of dynamic quantity sensor. <P>SOLUTION: The dynamic quantity sensor comprises: an SOI substrate 20; a movable section 2 which is supported by the SOI substrate and displaces parallel to a plane of the SOI substrate responding to an applied acceleration; plural movable pieces 4a-4i formed in a comb-tooth like shape protruding from both sides of the movable section along a displacement direction; plural fixed pieces 6a-6i which are disposed being fixed between the movable pieces so as to form a space between the neighboring movable pieces and are isolated from each other; and plural switches S1-S7 each constituted of a couple of a movable piece and a fixed piece neighboring each other, which are connected in parallel to a power supply E. The dynamic quantity sensor is configured so that, when the movable sections displace according to an applied acceleration, the number of the couples of neighboring movable pieces and the fixed pieces which come into contact with each other varies according to the magnitude of the acceleration, and to generate variable voltage according to the number of the couples. <P>COPYRIGHT: (C)2012,JPO&INPIT |
