| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a liquid immersion noncontact shape measuring apparatus capable of measuring a surface shape of a measurement workpiece in liquid. <P>SOLUTION: An underside of a laser probe 3 is covered with a container-shaped collet 24, and the collet can be vertically moved jointly with the laser probe 3. The collet 24 is immersed in a liquid in which a measurement workpiece 6 is disposed, so that a surface of the measurement workpiece 6 in the liquid can be measured with a laser beam L. Ion distribution of the surface of the measurement workpiece 6 in the liquid can be also measured with an electrode probe 26. <P>COPYRIGHT: (C)2012,JPO&INPIT |
