| 摘要 |
<p>Provided is a technology with which a vapor of an organic compound generated in a generating chamber does not flow back into an inner connection pipe for feeding the organic compound into the generating chamber. An apparatus 1 for producing an organic thin film includes a storage chamber 31 in which an organic material is placed, a generating chamber 33 for generating a vapor of the organic material by heating the organic material, and a transporting device 32 for feeding the organic material inside the storage chamber 31 into the generating chamber 33. The transporting device 32 includes an outer connection pipe 37 for gas-tightly connecting an inner atmosphere of the storage chamber 31 and an inner atmosphere of the generating chamber 33, an inner connection pipe 38 arranged inside the outer connection pipe 37, made of quartz and constructed so as to move the organic material from the interior of the storage chamber 31 to an interior of the generating chamber 33, and a gas introduction opening 42 for introducing a gas into the inner connection pipe 38.</p> |
