发明名称 Methods of making an emitter having a desired dopant profile
摘要 A method for obtaining a desired dopant profile of an emitter for a solar cell which includes depositing a first amorphous silicon layer having a first doping level over an upper surface of the crystalline silicon substrate, depositing a second amorphous silicon layer having a second doping level on the first amorphous silicon layer, and heating the crystalline silicon substrate and the first and second amorphous silicon layers to a temperature sufficient to cause solid phase epitaxial crystallization of the first and second amorphous silicon layers, such that the first and second amorphous silicon layers, after heating, have the same grain structure and crystal orientation as the underlying crystalline silicon substrate.
申请公布号 US8088675(B2) 申请公布日期 2012.01.03
申请号 US20090562734 申请日期 2009.09.18
申请人 RANA VIRENDRA V. S.;BACHRACH ROBERT Z.;APPLIED MATERIALS, INC. 发明人 RANA VIRENDRA V. S.;BACHRACH ROBERT Z.
分类号 H01L21/00 主分类号 H01L21/00
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