| 摘要 |
An apparatus for effectively detecting and calibrating a sample of examination system. The apparatus has an optical-electronic assembly for detection of the sample initiated with a light projected to the sample and an elastic supporting assembly for providing motion freedoms to adjust the relative geometric conditions between the optical-electronic assembly and the sample. The elastic supporting assembly has a planer structure and a cubic structure, and provides both motion freedoms on a plane and motion freedoms vertical to the plane. The optics electricity optical-electronic assembly could analyze the received reflected light to get geometric information of the sample, and could adjust the light used to detect the sample. |
