Manufacturing method of semiconductor light emitting diode

摘要

A semiconductor light emitting diode (LED) and a manufacturing method thereof are disclosed. The method for manufacturing a semiconductor light emitting diode (LED) includes: forming a light emission structure (20) including a first conductive semiconductor layer (21), an active layer (22), and a second conductive semiconductor layer (23) on a substrate (10) with prominences and depressions; removing the substrate from the light emission structure to expose a first concavoconvex portion (211) corresponding to the prominences and depressions; forming a protection layer (30) on the first concavoconvex portion; removing a portion of the protection layer to expose a convex portion of the first concavoconvex portion (211); and forming a second concavoconvex portion (212) on the convex portion of the first concavoconvex portion. The semiconductor light emitting diode (LED) includes: a light emission structure (20) including a first conductive type semiconductor layer (21), an active layer (22), and a second conductive type semiconductor layer (23); a first concavoconvex portion (211) formed on the light emission structure and having a second concavoconvex portion (212) at a convex portion thereof; and a protection layer (30) filling up a concave portion of the first concavoconvex portion.