发明名称 |
METHOD OF WORKING THIN LAYER ON WORK AND THIN LAYOR WORKING APPARATUS |
摘要 |
<p>An apparatus for machining a thin-film layer of a workpiece, which is a transparent glass on which a thin-film layer is disposed on a top surface thereof, includes a workpiece-underside support mechanism for supporting the workpiece in a vertical direction by an air floatation mechanism and a suction mechanism, a clamp device for gripping the workpiece so as to follow the movement in the vertical direction of the workpiece, and a machining head for machining the thin-film layer with a laser beam. The machining head machines the thin-film layer on the top surface of the workpiece by irradiating the workpiece with a laser beam entering through the underside of the workpiece. Further including nozzles, the thin-film layer is machined while the cooling medium is delivered from the nozzles disposed by the thin-film layer side.</p> |
申请公布号 |
KR20110139191(A) |
申请公布日期 |
2011.12.28 |
申请号 |
KR20117016007 |
申请日期 |
2010.02.24 |
申请人 |
HITACHI VIA MECHANICS, LTD. |
发明人 |
ARAI KUNIO;KANAYA YASUHIKO;ISHII KAZUHISA;HONDA HIROSHI |
分类号 |
B23K26/36;B23K26/10;B23K26/14;H01L31/04 |
主分类号 |
B23K26/36 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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