| 摘要 |
The invention relates to area of measuring engineering, in particular to measurement of volt-ampere characteristics (VAC) of semiconductor devices. The method of automated measurement of volt-ampere characteristics of semiconductor devices is in fact that one registers initial thermal state of the semiconductor device under investigation, to the semiconductor device under investigation one applies a sequence of rectangular electric pulses with varying amplitudes, duration of electric pulses is set individually for each semiconductor device under investigation, with choosing it as enough for setting transition process of response pulse, duration of pause after each electric pulse is determined by time that is needed for return of the semiconductor device under investigation to thermal state close to the initial one, one registers respective values of responses on sequence of electric pulses. Technical result of the method proposed is in bringing to minimum methodical error and, respectively, in increase of accuracy of measurements of the VAC of semiconductor devices irrespectively of operation speed of those and increase of range of permitted electric signals that are applied to semiconductor device at measurement without risk of its failure. |
