发明名称 |
PROCESSING APPARATUS AND FILM FORMING METHOD |
摘要 |
A processing apparatus for processing objects, includes: a processing container structure having a bottom opening and including a processing container having a processing space for housing the objects, the container having a nozzle housing area on one side of the processing space and a slit-like exhaust port on the opposite side of the processing space from the nozzle housing area; a lid for closing the bottom opening of the processing container structure; a support structure for supporting the objects and which can be inserted into and withdrawn from the processing container structure; a gas introduction means including a gas nozzle housed in the nozzle housing area; an exhaust means including a plurality of exhaust systems for exhausting the atmosphere in the processing container structure; a heating means for heating the objects; and a control means for controlling the gas introduction means, the exhaust means and the heating means. |
申请公布号 |
US2011312188(A1) |
申请公布日期 |
2011.12.22 |
申请号 |
US201113161874 |
申请日期 |
2011.06.16 |
申请人 |
WAMURA YU;MOROZUMI YUICHIRO;SATO IZUMI;ASARI SHINJI;TOKYO ELECTRON LIMITED |
发明人 |
WAMURA YU;MOROZUMI YUICHIRO;SATO IZUMI;ASARI SHINJI |
分类号 |
C23C16/455;H01L21/30;H01L21/306 |
主分类号 |
C23C16/455 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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