RESONATOR CHIP, RESONATOR, AND OSCILLATOR

摘要

PROBLEM TO BE SOLVED: To prevent a decrease in Q value due to thermoelastic effect and decrease CI value at the same time.

SOLUTION: A resonator chip has: a base; and vibration arms that extend from the base and have bending vibration portions which bend and vibrate. The bending vibration portions have a pair of main surfaces approximately parallel to a vibration plane of the bending vibration of the vibration arms. The bending vibration portions have three or more grooves formed along a direction perpendicular to the vibration plane on both sides or either one side of the main surfaces. An outer planar surface perpendicular to the vibration plane of the vibration arms, a pair of outer walls formed by a nearest one of the grooves to the outer planar surface, and a plurality of inner walls formed by adjacent pairs of the grooves are formed, thereby electrically bending and vibrating part or all of the plurality of inner walls.

COPYRIGHT: (C)2012,JPO&INPIT