VACUUM HOT PRESSING DIFFUSION BONDING APPARATUS

摘要

PURPOSE: A vacuum hot pressing-diffusion bonding apparatus is provided to prevent an unbalanced compressive force by regulating the height of a piston rod to control the tilting of a support. CONSTITUTION: A vacuum hot pressing-diffusion bonding apparatus comprises a chamber(110), a support(120) which supports the underside of a work piece(A) within the chamber, a pressing member(130) which applies pressure to the top of the work piece within the chamber, and a buffer member(160) which is arranged under the support with liquid filled in a housing space(161) and supports the pressure applied by the pressing member. The buffer member comprises an air cylinder(162) which is installed on a surface(170) in parallel to the pressing direction of the pressing member and a piston rod(163), one end of which is connected to the bottom of the support and the other end of which is moved lengthwise within the air cylinder.