MANUFACTURING APPARATUS, ITS MANAGEMENT METHOD, RECORDING MEDIUM, AND DEVICE MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To facilitate to associate problems occurred on a manufacturing apparatus with items to be investigated to suppress or correct factors of those problems.

SOLUTION: The management method of a manufacturing apparatus comprises: a step 102 to prepare a first correlation table which records correlation information of each one of a plurality of product problems of a manufacturing apparatus with a plurality of respective error factors; a step 104 to prepare a second correlation table which records correlation information of each one of the plurality of error factors with a plurality of respective management items of the manufacturing apparatus; a step 106 to specify at least one product problem; and step 108 and 110 to select management items which correspond to product problems designated by using the first and second correlation tables.

COPYRIGHT: (C)2012,JPO&INPIT