LINEAR EFFUSION CELL, METHOD OF MANUFACTURING THE SAME AND EVAPORATOR USING THE SAME

摘要

Disclosed herein is a linear effusion cell, which is used in a vacuum deposition system, including: a crucible made of pyrolytic boron nitride (PBN), having an open upper portion and containing a raw material; a first heat generating unit formed on an outer surface of the crucible and having a pattern suitable for heating; an array of orifices formed through the lateral sides of the crucible and the first heat generating unit.