发明名称 |
Displacement actuation and sensing for an electrostatic drive |
摘要 |
An electrostatic drive includes a first electrode and a second electrode responsive to a drive signal. The drive signal includes an actuation signal constituent and a sensing signal constituent. The sensing signal constituent is at a frequency higher than a natural mechanical resonant frequency of the electrostatic drive. In response to the actuation signal constituent, displacement between the first electrode and the second electrode changes, which is evaluated by detecting a change in an electrical characteristic of the drive as a function of the sensing signal constituent. |
申请公布号 |
US8076893(B2) |
申请公布日期 |
2011.12.13 |
申请号 |
US20080231673 |
申请日期 |
2008.09.04 |
申请人 |
DONG JINGYAN;FERREIRA PLACID M.;THE BOARD OF TRUSTEES OF THE UNIVERSITY OF ILLINOIS |
发明人 |
DONG JINGYAN;FERREIRA PLACID M. |
分类号 |
H02N1/00 |
主分类号 |
H02N1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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