发明名称 Method for the production of photo-patterned carbon electronics
摘要 A method for the manufacture of carbon based electrical components is herein presented. In the method a wafer substrate is provided upon which a first layer of carbon based semiconductor is deposited. The first layer of carbon based semiconductor is introduced to a first doping agent precursor and the first doping agent precursor and first layer of carbon based semiconductor are irradiated with light having a wavelength in the ultraviolet spectrum thereby selectively doping areas of the first layer of carbon based semiconductor.
申请公布号 US8076218(B2) 申请公布日期 2011.12.13
申请号 US20090497752 申请日期 2009.07.06
申请人 CAROTHERS DANIEL N.;THOMPSON RICK L.;BAE SYSTEMS INFORMATION AND ELECTRONIC SYSTEMS INTEGRATION INC. 发明人 CAROTHERS DANIEL N.;THOMPSON RICK L.
分类号 H01L21/00 主分类号 H01L21/00
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