发明名称 |
Method for the production of photo-patterned carbon electronics |
摘要 |
A method for the manufacture of carbon based electrical components is herein presented. In the method a wafer substrate is provided upon which a first layer of carbon based semiconductor is deposited. The first layer of carbon based semiconductor is introduced to a first doping agent precursor and the first doping agent precursor and first layer of carbon based semiconductor are irradiated with light having a wavelength in the ultraviolet spectrum thereby selectively doping areas of the first layer of carbon based semiconductor. |
申请公布号 |
US8076218(B2) |
申请公布日期 |
2011.12.13 |
申请号 |
US20090497752 |
申请日期 |
2009.07.06 |
申请人 |
CAROTHERS DANIEL N.;THOMPSON RICK L.;BAE SYSTEMS INFORMATION AND ELECTRONIC SYSTEMS INTEGRATION INC. |
发明人 |
CAROTHERS DANIEL N.;THOMPSON RICK L. |
分类号 |
H01L21/00 |
主分类号 |
H01L21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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