| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a template capable of reducing the hardening material filling time. <P>SOLUTION: The template is an imprinting template used for transcribing a pattern consisting of a large pattern which is a pad having a side of 100 nm or more, a dummy pattern or a mark and a fine pattern smaller than the large pattern to a first substrate which has had a coating of a hardening material applied thereto. This template includes a second substrate having a plane which is in contact with the hardening material, a concave section provided on the plane and having a convex-shaped contours corresponding to the large pattern which is transcribed to the first substrate, and a plurality of convex sections disposed inside the concave section in order to reduce the cubic volume of the concave section. The plurality of convex sections are arranged in matrix form or irregularly inside the concave section. <P>COPYRIGHT: (C)2012,JPO&INPIT |
