| 摘要 |
<P>PROBLEM TO BE SOLVED: To obtain a semiconductor physical quantity sensor which is capable of more suppressing the occurrence of sticking by reducing a contact area between opposite wall parts of a stopper and the other party side. <P>SOLUTION: Opposite wall parts 64b and 5c of a stopper 64a and a movable part 5 are formed so as to be, in a cross-sectional view along a depth direction of a gap part δ5, symmetrical with respect to a line connecting apexes Sp and Tp provided in positions nearer to each other than respective upper ends Su and Tu and lower ends Sd and Td of virtual perpendicular surfaces Sw and Tw opposite to each other, within ranges from the upper ends Su and Tu to lower ends Sd and Td. <P>COPYRIGHT: (C)2012,JPO&INPIT |
