| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a manufacturing method of a gas sensor element and a manufacturing method of a gas sensor, capable of reducing the using amount of noble metals for the inner surface of a base body. <P>SOLUTION: The manufacturing method of the gas sensor element is for forming an electrode 21 comprising the noble metal on the inner surface 1n of the base body 1 through a nucleus attaching process of attaching a nucleus to the inner surface 1n of the base body 1 and a plating process of depositing the noble metal in a plating solution 12 to the inner surface 1n of the base body 1 using the plating solution 12 on which the nucleus acts as a catalyst. Prior to the plating process, the method includes a plating resist film forming process of forming a plating resist film 10 at a part (electrode non-scheduled part 4) excluding an electrode scheduled part 3 where it is scheduled to form the electrode 21 in the inner surface 1n of the base body 1. In the plating process, the noble metal is deposited at the electrode scheduled part 3. After the plating process, a burning process of burning the plating resist film 10 is provided. <P>COPYRIGHT: (C)2012,JPO&INPIT |
