PHOTOACID GENERATOR, METHOD FOR MANUFACTURING THE SAME AND RESIST COMPOSITION COMPRISING THE SAME

摘要

PURPOSE: A photoacid generator is provided to improve a line width roughness with the slow diffusion rate of acid generated at exposure, and control the elution of solvent. CONSTITUTION: A photoacid generator is in the chemical formula 1. In the chemical formula1, Y is selected from the group consisting of C3-30 cycloalkyl group and C3-30 cycloalkenyl. Q1 and Q2 is halogen atom, respectively, independently from one another. X is selected from the group consisting of alkanediyl, alkanediyl, NR', S, O, CO and combination thereof. R is selected from the group consisting of hydrogen and alkyl group. n is the integer of 0-5. A+ is a counter ion.