MINUTE PARTICLES GENERATION DEVICE

摘要

PURPOSE: A particle creation apparatus is provided to arrange a filter member in a discharge hole and filter discharged first and second particles, thereby creating particles with uniform size. CONSTITUTION: A chamber(10) comprises a discharge hole(41). A particle creation part(20) is included in the chamber. The particle creation part generates a first particle by spraying first and second gases. An impactor(30) is included in one side of the particle creation part within the chamber. The impactor generates a second particle discharged through the discharge hole by colliding with the first particle.