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发明名称
DEPOSITION APPARATUS FOR ORGANIC EL AND EVAPORATING APPARATUS
摘要
申请公布号
KR101088828(B1)
申请公布日期
2011.12.06
申请号
KR20090056318
申请日期
2009.06.24
申请人
发明人
分类号
H01L51/56;C23C14/24;H05B33/10
主分类号
H01L51/56
代理机构
代理人
主权项
地址
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