METHOD AND APPARATUS FOR MEASURING INTRA-DIE TEMPERATURE

摘要

PURPOSE: A method and apparatus for measuring an intra-die temperature are provided to enhance infrared ray detection efficiency by cooling a radiation detector during ramping up a temperature. CONSTITUTION: The radiation source(40) of a heat processing chamber(10) heats a DUT(Device Under Test) with incident radiation(60). A radiation detector(80) detects radiation(70) which is reflected from the DUT. The radiation detector is formed into a photoconductivity type. A processor generates a corrected temperature signal for the DUT by reacting to a second predetermined radiation range. A tungsten-halogen lamp generates short wavelength radiation in the range of about 0.35μm to 0.35 to about 3μm.