| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a temperature measurement probe, a temperature measurement device and a temperature measurement method using the probe, which can be used in a general-purpose scanning probe microscope device and are hardly affected by the heat deformation of samples. <P>SOLUTION: A temperature measurement probe comprises: a film 4 which is provided at one part of a first surface of a cantilever 2 having an opening at the center and is composed of the material having a thermal expansion coefficient which is different from that of the cantilever 2; and a film 5 which is provided at one part of a surface facing the first surface of the cantilever 2 and is composed of the same material as the film 4. When the film 4 and the film 5 are projected on a surface which is parallel to the cantilever 2, a projection image of the film 4 and a projection image of the film 5 are deviated. <P>COPYRIGHT: (C)2012,JPO&INPIT |
