发明名称 WIRE BONDING APPARATUS AND METHOD THEREOF
摘要 <p>PURPOSE: A wire bonding apparatus and a method thereof are provided to block heat supplied to a lead frame when a predetermined time is passed after the generation of a wire bonding error, thereby improving bonding properties of a wire bonding process by spraying a reduction gas. CONSTITUTION: A lead frame loading part(104) loads a lead frame with a mounted semiconductor chip to a transfer rail. A heater block heats the loaded lead frame. A wire bonding tool(108) performs a wire bonding process between the semiconductor chip and a lead of the lead frame. A lead frame unloading part(110) unloads the lead frame from the transfer rail in which the wire bonding process in the lead frame is completed. A control part senses malfunction of the wire bonding process generated in the lead frame. The control part separates the heater block from the lead frame when a predetermined time is passed after the generation of wire bonding malfunction.</p>
申请公布号 KR20110129170(A) 申请公布日期 2011.12.01
申请号 KR20100048649 申请日期 2010.05.25
申请人 SAMSUNG ELECTRO-MECHANICS CO., LTD. 发明人 YANG, SI JOONG;MOON, BOK GUN;PARK, SANG HUN
分类号 H01L21/60 主分类号 H01L21/60
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