| 摘要 |
<p>The disclosed MEMS resonator is provided with an input port to which an input voltage is applied, an output port for outputting an output current, and a vibrator, and comprises N units (where N is an integer greater than or equal to 2) of MEMS resonating units which are connected to the input port and the output port, wherein the N units of MEMS resonating units are serially connected with respect to the input port.</p> |
