| 摘要 |
A vibration gyro made of a single crystal piezoelectric material includes: a base; a plurality of resonating arms extending from the base; an excitation electrode formed on a surface of at least one of the plurality of resonating arms so as to vibrate at least the one of the plurality of resonating arms; and a piezoelectric element detecting a vibration component due to a Coriolis force acting perpendicularly to a vibrating direction of the plurality of resonating arms being vibrated by the excitation electrode, the piezoelectric element being mounted on a surface of at least one of the plurality of resonating arms and the base. |
