发明名称 |
A METHOD FOR MANUFACTURING OF THE TRANSPARENT ROLL MOLD FOR UV ROLL NANOIMPRINT LITHOGRAPHY |
摘要 |
<p>PURPOSE: A transparent roll mold manufacturing method for an ultraviolet roll nano imprint lithography is provided to form a nano pattern in a glass tube and minimize the thickness of functional materials by controlling a spin-coating speed or density of functional solutions. CONSTITUTION: A polymer mold with a micro pattern is provided. A master mold with functional materials is formed on the polymer mold. An adhesive layer is formed outside the glass tube by coating adhesive materials on the cylindrical glass tube. The functional materials are transferred on the glass tube. The nano pattern of the transferred functional materials is released.</p> |
申请公布号 |
KR101086083(B1) |
申请公布日期 |
2011.11.25 |
申请号 |
KR20100051842 |
申请日期 |
2010.06.01 |
申请人 |
KOREA UNIVERSITY RESEARCH AND BUSINESS FOUNDATION |
发明人 |
LEE, HEON;YANG, KI YEON |
分类号 |
H01L21/027 |
主分类号 |
H01L21/027 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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