| 发明名称 |
DEVICE FOR DETERMINATION OF PLASMA ETCHING PROCESS FINISHING |
| 摘要 |
A device for determination of end of plasma etching process relates to electronics. The technical result is incorporation of new units and connections. |
| 申请公布号 |
UA64926(U) |
申请公布日期 |
2011.11.25 |
| 申请号 |
UA20110004431U |
申请日期 |
2011.04.11 |
| 申请人 |
VINNYTSIA NATIONAL TECHNICAL UNIVERSITY |
发明人 |
KRAVCHENKO SERHII YURIIOVYCH;KRAVCHENKO YURII STEPANOVYCH;OSADCHUK VOLODYMYR STEPANOVYCH |
| 分类号 |
H01L21/302 |
主分类号 |
H01L21/302 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
