IMAGE FORMATION METHOD AND IMAGE FORMATION DEVICE

摘要

Provided are an image formation method and a charged particle beam device which can accurately measure a plurality of objects to be measured and contained in an image by executing a small number of scans. For this, a scan line is set in a direction other than the edge direction of a plurality of objects to be measured and contained in the image view field and the charged particle beam is scanned according to the setting. Provided also are a method and a device for setting a scan line direction in an appropriate direction not affected by the pattern deformation or the like. For this, a direction of disconnection between two patterns to be connected is obtained according to the deformation of the two patterns and a scan line is set in the direction determined according to the one of more directions of disconnection.